NOTCH POLISHING WHEELS FOR SILICON

NOTCH POLISHING WHEELS

Spartan Polishing Pad Division of the Spartan Felt Company is a custom manufacturer of Notch Polishing Wheels for the semiconductor industry.

Over 30 years ago, we had a vision to provide custom engineering and manufactured products to technical polishing applications. One  “applications-specific” requirement is the polishing of the “V” groove known as the notch of a semiconductor wafer. It is imperative that the surfaces of the ground notch have high quality polished faces.

Our proprietary material compositions provide:

• Superior Life Expectancy
• Excellent Surface Finish Quality
• Reduced slurry usage
• Water based treatment “Enviromentally Friendly”
• Dimensional Consistiency

POLISHING PAD DETAILED INFORMATION

All pads are available plain and perforated. Embossing is available, but limited. Please inquire about specific applications.

TYPICAL NOTCH POLISHING WHEEL SPECIFICATIONS:
Hardness	60-74 Shore A
Weight Density	0.310-0.430 gr./cm3
Compressibility	3.0-15.0% (overall)
Wheel O.D.	7.9ӯ
Wheel I.D.	6.0ӯ
Thickness	.180”