SEMICONDUCTOR PREPARATION

SEMICONDUCTOR PREPARATION POLISHING PADS

The backbone of the semiconductor industry is the integrated circuit. IC’s use silicon and germanium wafers as the basis for the original microchip. Such microchips have become smaller in scale over the years and therefore the quality and consistency if the polishing pads used to prepare the active surfaces also need to improve. In the manufacturing of Spartan Polishing Pads, quality control is essential in providing a consistent product. Pad types range from medium-hard densities to soft textures in order to meet the total surface preparation spectrum. Traditional virgin material polishing as well as planarization applications can be accomplished using Spartan Polishing Pads.

POLISHING PAD DETAILED INFORMATION

All pads are available plain and perforated. Embossing is available, but limited. Please inquire about specific applications.

All pads are available with our own specially developed PSA, magnetic or loop backing to be used with various hook attachments. We currently have 2 types of PSA that cover 2 specific markets. Our standard is for the glass industry is one that resists temps up to 120F, peels easily from the plate and can actually be reapplied. Our second type of PSA is a 3M product that is temperature resistant up to 160F, resistant of pH changes from 5 to 10, but may leave some adhesive on the plate (depending on how it is run and removed).


HPB75 | HPC75 | HPB35 | PORETEX

Spartan Polishing Pad Division

HPB75 POLISHING MATERIAL

DESCRIPTION:
White fiber based resin treated polyurethane pad for diverse polishing applications and surfaces. The fiber material makes excellent interconnecting cellular structures, which make the pad highly durable and dimensionally stable. This material is designed for rapid stock removal and superb surface finishes.
FOR USE ON:
Hand Held Machines/Low to medium pressure applications
DUROMETER:
Shore C Scale 40
COMPRESSION %:
2-4% (4 pound force displacement)
DENSITY:
.37 g/cm3
THICKNESS:
.090” and .150”
DIAMETER:
Up to 53” Sheets or Pads
SURFACE PREPARATION:
Plain, Perforated or Embossed.
BACKINGS:
Easy Apply/Remove PSA is Standard. High Temperature PSA and Magnetic Backing are Available.
IMPREGNATIONS:
Abrasive Impregnates in limited styles.
CAN REPLACE:
SUBA X or PELLON
PERFORMANCE:
HPB75 offers equal polishing as our HPB60 pad for customers who want a slightly higher density and durometer.

 

HPC75 POLISHING MATERIAL

DESCRIPTION:
White or color fiber based resin treated polyurethane pad for diverse polishing applications and surfaces. The fiber material makes excellent interconnecting cellular structures, which make the pad highly durable and dimensionally stable. This material is designed for rapid stock removal and superb surface finishes.
FOR USE ON:
Crystal and Medium Hardness Glass, Quartz, Stainless Steel
DUROMETER:
Shore C Scale 50
COMPRESSION %:
3-5% (1/2 pound force displacement)
DENSITY:
.33 g/cm3
THICKNESS:
.050”
DIAMETER:
Up to 53” Sheets or Pads
SURFACE PREPARATION:
Plain, Perforated or Embossed.
BACKINGS:
Easy Apply/Remove PSA is Standard. High Temperature PSA and Magnetic Backing are Available Upon Request.
IMPREGNATIONS:
Abrasive Impregnates in limited styles.
CAN REPLACE:
SUBA X or PELLON
PERFORMANCE:
HPC75 is the softest of our HPC hard class pads. This material is often used on automated machines with non-critical flatness, but high finish requirements.

 

HPB35 POLISHING MATERIAL

DESCRIPTION:
White fiber based resin treated polyurethane pad for diverse polishing applications and surfaces. The fiber material makes excellent interconnecting cellular structures, which make the pad highly durable and dimensionally stable. This material is designed for rapid stock removal and superb surface finishes.
FOR USE ON:
Art Glass, Soft Scientific Glass and Polycarbonate
DUROMETER:
Shore C Scale 35
COMPRESSION %:
5-7% (4 pound force displacement)
DENSITY:
.35 g/cm3
THICKNESS:
.125” and .275”
DIAMETER:
Up to 53” Sheets or Pads
SURFACE PREPARATION:
Plain, Perforated or Embossed.
BACKINGS:
Easy Apply/Remove PSA is Standard. High Temperature PSA and Magnetic Backing are Available Upon Request.
IMPREGNATIONS:
Abrasive Impregnates in limited styles.
CAN REPLACE:
Natural Wool and Other Soft Synthetic Felts
PERFORMANCE:
HPB35 is our softest and most forgiving pad. Designed for hand polishing, HPB35 retains a high amount of water for efficient slurry delivery with various sized parts and under a wide variety of pressures and polishing styles.

 

Poretex Polishing Pad

DESCRIPTION:
In the surface preparation process, there is a need to produce ultra polished surfaces with synthetic pads. Spartan Felt Company’s suede polishing material is
designed to generate final polished surfaces using submicron slurries. It’s unique, resilient design allows the pore structure to recover from polishing compression and setsup a fluid transfer action with the slurry. Poretex Pads are available in plain, embossed or textured front surfaces. Pressure sensitive adhesive is standard for use with a wide pH slurry range.
NAP LENGTH:
» 50 μ
WEIGHT:
598 grams/linear yd.
COMPRESSION %:
12%
DENSITY:
.35 g/cm3
THICKNESS:
1.2 mm
DIAMETER:
Precut or 53” wide rolls
HARDNESS:
68 SHORE A
PORE SIZE:
» 400 UM

 

 

Spartan Polishing Pad Division
PO Box 1932 Spartanburg, SC 29304
Telephone - (864) 680-5300 | Fax - (864) 574-4507
jwelty@spartanfelt.com